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3819 Charles Steward Dr.
Fairfax, VA 22033
Email us at:
Info@lt-technologies.com |
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M Radar-100 Microwave RTP System
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M Radar-100 is a microwave based rapid thermal processing (RTP) system.
It consists of (1) a microwave signal and power source,
(2) microwave heating set, and (3) a PC based temperature control system. An antenna analyzer and an IR pyrometer
are also used for monitoring microwave and temperature respectively.
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(1)Microwave singal generator and power source
(2)Microwave heating set
(3)PC based temperature control system and software
Novel features of M Radar-100 RTP
• Ultra-high heating temperature (>2000C)
• Extraordinarily high ramping rate (>1000C/second)
• Selective heating of heterostructure
• PC based process control system for modulating RF waveform and assuring temperature accuracy
• Embedded and real-time software features graphical user interfaces, recipe management, data acquisition, display and anaysis on MATLAB platform
Applications:
• Compound semiconductor annealing (SiC, GaN and ZnO)
• Implant activation
• Contact annealing and alloying
• Rapid thermal oxidation, nitridation and silicide formation
• Rapid sintering of advanced ceramics
• Bonding and packaging of microelectronics and MEMS
• Rapid synthesis of nanomaterials
• Rapid Thermal Chemical Vapor Deposition (CVD and MOCVD)
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