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3819 Charles Steward Dr.
Fairfax, VA 22033
Email us at:
Info@lt-techologies.com |
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M Radar-100 Microwave RTP System
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M Radar-100 is a microwave based rapid thermal processing (RTP) system
for R&D of semiconductors and devices. The product is capable of generating variable frequency, high-power, short-duration, spatially uniform, and
material-specific energy pulses. A PC based digital control system assures temperature
stability and accuracy.
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The novel features of M Radar-100 Microwave RTP:
• Ultra-high heating temperature (>2000C)
• Extraordinarily high ramping rate (>1000C/second)
• Selective heating of heterostructure
• PC based process control system for assuring temperature accuracy
Applications:
• Compound semiconductor annealing (SiC, GaN and ZnO)
• Contact annealing and alloying
• Rapid sintering of advanced ceramics
• Rapid synthesis of nanomaterials
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