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    Product Overview
    M Radar-100 Microwave RTP System  
    M Radar-100 is a microwave based rapid thermal processing (RTP) system for R&D of semiconductors and devices. The product is capable of generating variable frequency, high-power, short-duration, spatially uniform, and material-specific energy pulses. A PC based digital control system assures temperature stability and accuracy.

     


    The novel features of M Radar-100 Microwave RTP:  
    Ultra-high heating temperature (>2000C)
    Extraordinarily high ramping rate (>1000C/second)
    Selective heating of heterostructure
    PC based process control system for assuring temperature accuracy

    Applications:
    Compound semiconductor annealing (SiC, GaN and ZnO)
    Contact annealing and alloying
    Rapid sintering of advanced ceramics
    Rapid synthesis of nanomaterials
     
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